Stylus Profilometers use a physical probe that moves across to detect the heights and valleys present on the surface. Mechanically, this is accomplished using a feedback system that maintains the probe at a given torque, or ‘set point,’ and the change in the z position of the arm aids in reconstructing the surface.
Dektak Stylus Profilometer can be used for step height measurement for thin and thick film, profiling surface topography and waviness and roughness in the nanometer range.
This technique is extremely sensitive and provides high z resolution. As in this technique, the probe physically touches the surface, which could be destructive to some soft surfaces, and the probe can also get contaminated. Stylus tip, size, shape, and other parameters can be optimized for the desired measurement.
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