The Dektak Stylus Profilometer is a high-precision surface characterization tool used for step height, surface roughness, and film thickness measurements. Mechanically, this is accomplished using a feedback system that maintains the probe at a given torque, or 'set point,' and the change in the z position of the arm aids in reconstructing the surface.
Key Features:
High accuracy and repeatability: Step height repeatability of <5 Å ensures reliable measurements.
Wide measurement range: Capable of measuring step heights up to 1 mm and scan lengths up to 55 mm.
Low-force stylus: Operates with 1–15 mg stylus force, minimizing sample damage.
Advanced optical system: Equipped with a 3 MP color video microscope for real-time sample viewing and alignment.
Automated analysis: Software enables automatic step detection, stress analysis, and surface parameter evaluation (slope, area, volume, etc.).
Versatile stage: Manual X–Y translation and 360° rotation.
User convenience: Quick-change stylus mount and vacuum chuck options for various sample sizes.