Semiconductor characterization system - Keithley 4200 with 4221 RPMs
Performs current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V measurements. The system is equipped with 3 SMUs capable of doing 2, 3, and 4 terminal measurements. Also, the PMU module is capable of generating voltage pulses of widths in nano seconds.
